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The Elionix range of Electron Beam Lithography Systems (EBL) are world renowned as having the best repeatability and highest resolution writing capabilities for tomorrow's demanding lithography research requirements.

Established in Tokyo Japan in 1975 Elionix has fast become the number one manufacturer for EBL systems with presitige installations at Harvard, MIT, Duke, Princeton, UC Berkeley, RIKEN, and many more..... 

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