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OVERVIEW
SPECIFICATIONS
Brand: MKS
Part No: ENI-2500-13.56
Availability: 6-8 weeks

Matchwork® Impedance matching networks provide efficient, quick tuning of your RF generator for applications such as PECVD, HDPCVD and etch. MKS line of "off-the-shelf" and customized automatic matching networks provides fast and efficient impedance matching for all of your solar, semiconductor, and flat panel applications.

MKS matching networks utilize fuzzy logic algorithms and stepper motor drive technology to produce fast, accurate and repeatable matching. MKS automatic tuning matching networks quickly transform plasma impedances to 50 ohms to maximize power transfer to your chamber.

MKS matching networks can be operated in three tuning modes. Fully automatic mode where the match continuously tunes as the plasma impedance changes, manual mode to allow the operator to adjust the capacitors during process, and preset mode when the operator has knowledge of various load conditions and wants to set the capacitor positions near their final matched values before the match automatically fine tunes to the final position.

A Digital Solution for RF Power Tuning and Transfer Requirements

Process Repeatability:

  • Microprocessor control
  • Fuzzy logic tuning algorithm to find and track difficult tune points
  • Preset capacitor capability, multiple stored presets

Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

Frequency 13.56.MHz
Rated Input Power Range 50-2,500 W
RF Input Impedance 50 ohms
Output Voltage 2500 Vrms
Output Current 50 Arms
RF Input Connector N or HN
Output Connector Half lap stud
Power Required 24 Vdc
Cooling Forced Air
Dimmensions (HxWxD) 5.5 x 12.25 x 10.0 inches
Weight 29 lbs (13 kg)
    OVERVIEW
    SPECIFICATIONS
    Brand: MKS
    Part No: ENI-2500-13.56
    Availability: 6-8 weeks

    Matchwork® Impedance matching networks provide efficient, quick tuning of your RF generator for applications such as PECVD, HDPCVD and etch. MKS line of "off-the-shelf" and customized automatic matching networks provides fast and efficient impedance matching for all of your solar, semiconductor, and flat panel applications.

    MKS matching networks utilize fuzzy logic algorithms and stepper motor drive technology to produce fast, accurate and repeatable matching. MKS automatic tuning matching networks quickly transform plasma impedances to 50 ohms to maximize power transfer to your chamber.

    MKS matching networks can be operated in three tuning modes. Fully automatic mode where the match continuously tunes as the plasma impedance changes, manual mode to allow the operator to adjust the capacitors during process, and preset mode when the operator has knowledge of various load conditions and wants to set the capacitor positions near their final matched values before the match automatically fine tunes to the final position.

    A Digital Solution for RF Power Tuning and Transfer Requirements

    Process Repeatability:

    • Microprocessor control
    • Fuzzy logic tuning algorithm to find and track difficult tune points
    • Preset capacitor capability, multiple stored presets

    Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

    Frequency 13.56.MHz
    Rated Input Power Range 50-2,500 W
    RF Input Impedance 50 ohms
    Output Voltage 2500 Vrms
    Output Current 50 Arms
    RF Input Connector N or HN
    Output Connector Half lap stud
    Power Required 24 Vdc
    Cooling Forced Air
    Dimmensions (HxWxD) 5.5 x 12.25 x 10.0 inches
    Weight 29 lbs (13 kg)

      MWD-25LD, 13.56MHZ, 2.5KW IMPEDANCE MATCHING NETWORK

      OVERVIEW
      SPECIFICATIONS
      Brand: MKS
      Part No: ENI-2500-13.56
      Availability: 6-8 weeks

      Matchwork® Impedance matching networks provide efficient, quick tuning of your RF generator for applications such as PECVD, HDPCVD and etch. MKS line of "off-the-shelf" and customized automatic matching networks provides fast and efficient impedance matching for all of your solar, semiconductor, and flat panel applications.

      MKS matching networks utilize fuzzy logic algorithms and stepper motor drive technology to produce fast, accurate and repeatable matching. MKS automatic tuning matching networks quickly transform plasma impedances to 50 ohms to maximize power transfer to your chamber.

      MKS matching networks can be operated in three tuning modes. Fully automatic mode where the match continuously tunes as the plasma impedance changes, manual mode to allow the operator to adjust the capacitors during process, and preset mode when the operator has knowledge of various load conditions and wants to set the capacitor positions near their final matched values before the match automatically fine tunes to the final position.

      A Digital Solution for RF Power Tuning and Transfer Requirements

      Process Repeatability:

      • Microprocessor control
      • Fuzzy logic tuning algorithm to find and track difficult tune points
      • Preset capacitor capability, multiple stored presets

      Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

      Frequency 13.56.MHz
      Rated Input Power Range 50-2,500 W
      RF Input Impedance 50 ohms
      Output Voltage 2500 Vrms
      Output Current 50 Arms
      RF Input Connector N or HN
      Output Connector Half lap stud
      Power Required 24 Vdc
      Cooling Forced Air
      Dimmensions (HxWxD) 5.5 x 12.25 x 10.0 inches
      Weight 29 lbs (13 kg)
        OVERVIEW
        SPECIFICATIONS
        Brand: MKS
        Part No: ENI-2500-13.56
        Availability: 6-8 weeks

        Matchwork® Impedance matching networks provide efficient, quick tuning of your RF generator for applications such as PECVD, HDPCVD and etch. MKS line of "off-the-shelf" and customized automatic matching networks provides fast and efficient impedance matching for all of your solar, semiconductor, and flat panel applications.

        MKS matching networks utilize fuzzy logic algorithms and stepper motor drive technology to produce fast, accurate and repeatable matching. MKS automatic tuning matching networks quickly transform plasma impedances to 50 ohms to maximize power transfer to your chamber.

        MKS matching networks can be operated in three tuning modes. Fully automatic mode where the match continuously tunes as the plasma impedance changes, manual mode to allow the operator to adjust the capacitors during process, and preset mode when the operator has knowledge of various load conditions and wants to set the capacitor positions near their final matched values before the match automatically fine tunes to the final position.

        A Digital Solution for RF Power Tuning and Transfer Requirements

        Process Repeatability:

        • Microprocessor control
        • Fuzzy logic tuning algorithm to find and track difficult tune points
        • Preset capacitor capability, multiple stored presets

        Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

        Frequency 13.56.MHz
        Rated Input Power Range 50-2,500 W
        RF Input Impedance 50 ohms
        Output Voltage 2500 Vrms
        Output Current 50 Arms
        RF Input Connector N or HN
        Output Connector Half lap stud
        Power Required 24 Vdc
        Cooling Forced Air
        Dimmensions (HxWxD) 5.5 x 12.25 x 10.0 inches
        Weight 29 lbs (13 kg)
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