Part No: GEW3540
Availability: 6-8 weeks
MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.
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