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OVERVIEW
Brand: MKS
Part No: GEW3540
Availability: 6-8 weeks

MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.

Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

    OVERVIEW
    Brand: MKS
    Part No: GEW3540
    Availability: 6-8 weeks

    MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

    Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.

    Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

      GEW3540, 40.68 MHZ, 3.5KW RF PLASMA GENERATOR

      OVERVIEW
      Brand: MKS
      Part No: GEW3540
      Availability: 6-8 weeks

      MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

      Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.

      Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

        OVERVIEW
        Brand: MKS
        Part No: GEW3540
        Availability: 6-8 weeks

        MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

        Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.

        Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.

          Enquiry sent successfully
          Product Enquiry