Part No: elite 600HP-01
Availability: 6-8 weeks
MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.
13.56MHz is the frequency most commonly used for plasma processes. MKS RF plasma generators are the most advanced class of 13.56 MHz generators commercially available. These RF generators are designed for all 13.56MHz applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.
- Frequency Stability of ±0.005%
- Unlimited load impedance range
- Excellent reliability
RF Plasma Generators; 750, 600, & 300 Watt, 13.56 MHz RF Power Supplies
elite™ RF plasma generators provide state-of-the art technology in a compact air-cooled package. Each elite™ RF Power Supply is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. Its design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.
FEATURES & BENEFITS:
- Air cooled for lower facilities cost - does not require connection to factory cooling loop
- High efficiency design, DC to RF efficiency of >85% for low power consumption
- Compact half rack enclosure enables direct tool mounting
- Integrated single board design eliminates cables and connectors
elite RF Plasma Generators may be used as source or bias generators for continuous operation or as stand-alone batch tools, and is ideally suited for Solar, LED, MEMs and semiconductor applications.
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