MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.
13.56MHz is the frequency most commonly used for plasma processes. MKS RF plasma generators are the most advanced class of 13.56 MHz generators commercially available. These RF generators are designed for all 13.56MHz applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.
- Frequency Stability of ±0.005%
- Unlimited load impedance range
- Excellent reliability
GHW RF plasma generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield.
GHW Series RF Plasma Geneators are available at 208 VAC and 400/480 VAC.
FEATURES & BENEFITS:
- Auto-Frequency Tuning (optional) allows fixed matching networks - faster tuning and lower system cost.
- Excellent Reliability - increased uptime and lower cost of ownership.
- Automatic load mismatch protection guards against over-dissipation from adverse loads.
- Unlimited load impedance range for stable power into any load.
GHW RF plasma generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
All MKS Instruments' RF Generators are NRTL certified and CE marked.
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