MKS, ENI® RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. ENI RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.
Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.
13.56MHz is the frequency most commonly used for plasma processes. MKS RF plasma generators are the most advanced class of 13.56 MHz generators commercially available. These RF generators are designed for all 13.56MHz applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.
- Frequency Stability of ±0.005%
- Unlimited load impedance range
- Excellent reliability
The SurePower® platform of RF plasma generators is the most advanced class of 13.56 MHz generators commercially available. SurePower® architecture incorporates state-of-the-art RF topologies, patented intrinsic power amplifier protection, improved design margins, and embedded V-I sensor to achieve superior reliability, reproducibility, and accuracy. All SurePower® models run on 208VAC mains. Some models are available to run on 400/480 VAC mains.
Performance of SurePower plasma generators can be enhanced with the addition of the newly released and patented Dynamic Frequency Tuning option. DFT is a significant enhancement over traditional AFT which uses guided search algorithms. Conventional frequency tuning schemes require more than 500 µsec of course and fine steps to search for the minima in reflected power. With DFT, measurement of power distortion is used to quickly and accurately adjust frequency achieving minima in reflected power in less than 50µsec
FEATURES & BENEFITS:
- Dynamic Frequency Tuning reduces plasma stabilization time and maintains minimum reflected power.
- Forward power accuracy of <±1.0% of set point
- Common Exciter - CEX enables frequency synchronization.
- Full functional front panel eases use for process development.
- Arc detection folds power back to minimize damage caused by arcs.
SurePower® RF power generators are designed for all 13.56MHz applications including: PECVD, HDPCVD, PVD, ALD, etch, and strip for the manufacture of integrated circuits, photovoltaic devices, flat panel displays, and optical media. SurePower generators assure repeatable results wafer to wafer and lot to lot.
All MKS Instruments' RF Generators are NRTL certified and CE marked.
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