THERMAL & PRESSURE-BASED MASS FLOW CONTROLLERS FOR SPECIAL APPLICATIONS
Certain process vapors and gases require mass flow controllers of a special design specific to the material as well as process conditions. MKS offers both thermal mass flow controllers and pressure based mass flow controllers for these applications that require flow control at elevated temperatures and/or low pressure drop conditions given the source material charactertics.
Many process applications use source materials that are liquids or solids or have low vapor pressures at room temperature. Each source material and application will define unique requirements for its measurment and control. Some materials may be delivered at typical ambient temperatures using a low pressure drop device. Others will require heating to develop sufficient vapor pressure for delivery to the process environment. MKS offers a variety of products (both thermal & pressure-based mass flow controllers) designed for the direct control delivery of these materials without the need for a carrier gas.
1152C Heated Pressure-based Mass Flow Controller, Using Laminar Flow for High Temperature Operation up to 150 degrees C
Uses principle of viscous flow through a laminar flow tube
For controlled temperature operation between 30 and 150 degrees Centigrade
Analog I/O: 0 to 5 VDC
Product configuration unique to each application - Contact Flow Applications
Laminar Flow for High Temperature Operation up to 150 degrees C
The MKS Instruments 1152C Vapor Source MFC is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control (U.S. patent No. 4,679,585). The 1152C contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range.
The 1152C Heated Pressure-Based Mass Flow Controller Using Viscous Flow Through a Laminar Flow Tube is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.
Every effort has been taken to ensure the completeness and accuracy of MKS Instruments product information. For up to date information on this category from MKS please click here.