Part No: HPS Pumpkits
Availability: 6-8 weeks
Customized piping to the vacuum pump.
This can include:
- Spool piece wth gauge or leak check port
- Manual or pnumatic isolation valve
- Flexible line
MKS Instruments Pumpkit Benefits:
- Enables quick check when tool vacuum loss identified, as to its source
- Eliminates many timely and costly pump swap-outs, rebuilds, and system requalifications
- Allows pump running during tool PM's
- Reduces the risk of restart problems
- Removes the hazard of atmospheric exposure to the pump
- Allows for pump-specific installation
- Creates overall cost reduction
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