MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(1x10^-8 Torr to Atmosphere)

Cold cathode inverted magnetron and MicroPirani™ pressure/vacuum gauge

The 972B DualMag™ vacuum transducer combines cold cathode inverted magnetron and MicroPirani™ thermal conductivity MEMS vacuum sensor technologies. The MicroPirani™ offers 1-2 decades lower measuring range than a traditional Pirani gauge for lower control pressures.

FEATURES & BENEFITS:

• Small footprint design provides a compact vacuum gauge solution that saves tool space
• User serviceable to decrease downtime
• Both analog and digital communication
• Low cost multi-sensor design
• Optional local display

APPLICATIONS:

• Analytical equipment (mass spectrometer control)
• Scanning electron microscopes
• Coating systems
• General vacuum base pressure measurement