1/8 inch NPT-F; RS232/Analog 15 pin HD sub-D male, no relay_1207768
Representative image only

1/8 inch NPT-F; RS232/Analog 15 pin HD sub-D male, no relay

CommunicationRS232/Analog
Connector Relays15 pin HD sub-D male, no relay
DisplayYes
Fitting1/8 inch NPT-F
SealViton®
925 MicroPirani dimensional drawing
925 MicroPirani data sheet
925 MicroPirani Standard Version setup instructions
MKS Vacuum Gauge, Controller, & Module product overview
Shrinking the Pirani Vacuum Gauge
Overview

MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(1.0x10-5 Torr to Atmosphere)

Pressure/vacuum gauges with MEMS-based Micro Pirani™ vacuum sensors

The 925 Micro Pirani™ vacuum transducer is a thermal conductivity vacuum gauge based on a unique, MEMS-based (Micro-Electro-Mechanical Systems) vacuum sensor. The 925 Micro Pirani™ offers analog voltage output, digital interface and set point relays for process controlling.

FEATURES & BENEFITS:

  • Increased measurement range from 10-5 Torr to Atmosphere, two decades beyond a standard Pirani
  • Analog output and digital communication
  • Mountable in any orientation
  • Three optional set point relays for process control
  • Optional local display

APPLICATIONS:

The 925 Micro Pirani™ vacuum gauge can be used in many different vacuum monitoring and control applications, such as semiconductor, analytical, and industrial coating (solar) and freeze drying:

  • General vacuum pressure measurement
  • Foreline and roughing pressure measurement
  • Gas backfilling measurement and control
  • Mass spectrometer control
  • Activation of UHV gauges
  • System process control (interlocks, valves, pumps)
  • Control system pressure

The 925 Micro Pirani™ vacuum gauge can be configured with other flanges and vacuum terminations, electrical connectors (Hirschmann, RJ45/FCC68), a UHV enclosure seal, and custom analog output voltages to emulate voltage outputs from a variety of other transducers for "plug and play" replacement of other vendors' gauges in OEM applications without changing system software. Contact MKS Customer Service for details and assistance.

VCR® compatible parts may be used.
VCR® is a registered trademark of Swagelok® Company.

Over 40,000 Customers Trust John Morris