The 902B-51014 Absolute Piezo Vacuum Transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. It features an 8 VCR fitting and a RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. In addition, the 902B has a 16 bit 0-10 VDC analog pressure output that is linear at 10 mV/Torr and can be interfaced to external analog equipment for pressure readout or close loop control. It has a male DB9 connector offering backward compatibility with the first generation 902. One mechanical relay is included for process control use, for example interlocking isolation valves and vacuum pumps. The SPDT relay includes both normally open and closed contacts and can be set to energize above or below a set point trip value. Many applications require continuous surveillance of system pressure and warning of atypical pressure levels. The flexible relay options of the 902B can provide warning to external safety logic in cases of abnormal pressure and loss of power. The 902B provides economical, absolute pressure measurement that is independent of gas type. With a measurement range of 0.1 to 1000 Torr Full Scale, the sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace. The Series 902B Piezo transducer is based on a silicon piezo resistive pressure sensor that measures absolute vacuum pressure with an accuracy of ±1% of Reading (from 10-1000 Torr). The sensor is robust and resistant to mechanical vibration and g-forces. Furthermore, the sensor technology makes the transducer gas type independent. With only stainless steel 316 exposed to the process gas, the transducer can be used in many demanding applications. The compact design of the 902B significantly reduces the amount of space occupied by the transducer. This is particularly appealing to system designers and allows design of compact systems or equipment. The 902B can be used as a standalone device or together with the PDR900 controller. The included display offers real time readout of measured pressure, view of transducer settings and set point status.
Piezo Vacuum Transducer, Display, 0.1-1000 Torr, 8 VCR, RS232, 0-10 VDC, DB9, 1 Relay
902B dimensional drawing
902B data sheet
MKS Vacuum Gauge, Controller, & Module product overview
The 902B-51014 Absolute Piezo Vacuum Transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. It features an 8 VCR fitting and a RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. In addition, the 902B has a 16 bit 0-10 VDC analog pressure output that is linear at 10 mV/Torr and can be interfaced to external analog equipment for pressure readout or close loop control. It has a male DB9 connector offering backward compatibility with the first generation 902. One mechanical relay is included for process control use, for example interlocking isolation valves and vacuum pumps. The SPDT relay includes both normally open and closed contacts and can be set to energize above or below a set point trip value. Many applications require continuous surveillance of system pressure and warning of atypical pressure levels. The flexible relay options of the 902B can provide warning to external safety logic in cases of abnormal pressure and loss of power. The 902B provides economical, absolute pressure measurement that is independent of gas type. With a measurement range of 0.1 to 1000 Torr Full Scale, the sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace. The Series 902B Piezo transducer is based on a silicon piezo resistive pressure sensor that measures absolute vacuum pressure with an accuracy of ±1% of Reading (from 10-1000 Torr). The sensor is robust and resistant to mechanical vibration and g-forces. Furthermore, the sensor technology makes the transducer gas type independent. With only stainless steel 316 exposed to the process gas, the transducer can be used in many demanding applications. The compact design of the 902B significantly reduces the amount of space occupied by the transducer. This is particularly appealing to system designers and allows design of compact systems or equipment. The 902B can be used as a standalone device or together with the PDR900 controller. The included display offers real time readout of measured pressure, view of transducer settings and set point status.
