The 901P-22034 Micro Pirani-Piezo Loadlock Vacuum Transducer combines Piezo and MicroPirani™ sensor technologies for significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. It features a 0.00001-1000 Torr pressure measurement range with atmospheric switching, and a size NW25 ISO-KF flange. It uses a RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement and features a digital display. The 901P has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-5 Torr and atmospheric switching capabilities. Compared to gauges used in traditional loadlock designs, the 901P accurate atmospheric pressure measurement can improve loadlock performance by faster cycle times and prevent contamination of loadlock with atmospheric air. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides patented, gas independent absolute pressure measurement from 50 -1000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani™ technology, the 901P can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 901P can be mounted in any orientation without compromising accuracy. The 901P also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. A secondary optional analog output is used to provide the differential pressure measurement. The 901P has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the differential piezo measurement or the combined absolute MicroPirani™/Piezo measurement. The 901P compact design significantly reduces the amount of space occupied by a vacuum gauge.
Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW25 ISO-KF, RS485
901P MicroPirani/Piezo dimensional drawing
Optimized Loadlock Pressure Sensing with the 901P Transducer
901P MicroPirani/Piezo Standard Version setup instructions
901P MicroPirani/Piezo data sheet
Process Improvement through Optimized Loadlock Operations
The 901P-22034 Micro Pirani-Piezo Loadlock Vacuum Transducer combines Piezo and MicroPirani™ sensor technologies for significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. It features a 0.00001-1000 Torr pressure measurement range with atmospheric switching, and a size NW25 ISO-KF flange. It uses a RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement and features a digital display. The 901P has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-5 Torr and atmospheric switching capabilities. Compared to gauges used in traditional loadlock designs, the 901P accurate atmospheric pressure measurement can improve loadlock performance by faster cycle times and prevent contamination of loadlock with atmospheric air. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides patented, gas independent absolute pressure measurement from 50 -1000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani™ technology, the 901P can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 901P can be mounted in any orientation without compromising accuracy. The 901P also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. A secondary optional analog output is used to provide the differential pressure measurement. The 901P has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the differential piezo measurement or the combined absolute MicroPirani™/Piezo measurement. The 901P compact design significantly reduces the amount of space occupied by a vacuum gauge.
