901P 4VCR-F Loadlock Tranducer Vacuum Sensor_1176381
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901P 4VCR-F Loadlock Tranducer Vacuum Sensor

CommunicationRS232
DisplayYes
Fitting4 VCR®-F
SealViton®
901P MicroPirani/Piezo dimensional drawing
Optimized Loadlock Pressure Sensing with the 901P Transducer
901P MicroPirani/Piezo Standard Version setup instructions
901P MicroPirani/Piezo data sheet
Process Improvement through Optimized Loadlock Operations
Overview

MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.

(1.0x10-5 to 1000 Torr) with Atmospheric Switching

Pressure/vacuum gauges with Piezo and MicroPirani™ vacuum sensors for load locks

Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.

FEATURES & BENEFITS:

  • 3-sensor functionality in a single transducer for a wide measurement range
  • Ultra compact design saves space
  • Setup, diagnostic and operation software available
  • Optional analog output and electrical connectors match other vendors' gauges for easy upgrades
  • Three optional setpoints
  • Optional local display

APPLICATIONS:

The 901P Micro Pirani™/Piezo Loadlock Vacuum Transducer is specifically designed for vacuum and pressure measurement within a vacuum load lock.

VCR® compatible parts may be used.
VCR® is a registered trademark of Swagelok® Company.

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