MKS, Granville-Phillips® modular vacuum gauges and transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important.
(1.0x10-5 to 1000 Torr) with Atmospheric Switching
Pressure/vacuum gauges with Piezo and MicroPirani™ vacuum sensors for load locks
Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
FEATURES & BENEFITS:
- 3-sensor functionality in a single transducer for a wide measurement range
- Ultra compact design saves space
- Setup, diagnostic and operation software available
- Optional analog output and electrical connectors match other vendors' gauges for easy upgrades
- Three optional setpoints
- Optional local display
APPLICATIONS:
The 901P Micro Pirani™/Piezo Loadlock Vacuum Transducer is specifically designed for vacuum and pressure measurement within a vacuum load lock.
VCR® compatible parts may be used.
VCR® is a registered trademark of Swagelok® Company.